Microelectromechanical system (mems) on application specific integrated circuit (asic)

ABSTRACT

In embodiments, a package assembly may include an application-specific integrated circuit (ASIC) and a microelectromechanical system (MEMS) having an active side and an inactive side. In embodiments, the MEMS may be coupled directly to the ASIC by way of one or more interconnects. The MEMS, ASIC, and one or more interconnects may define or form a cavity such that the active portion of the MEMS is within the cavity. In some embodiments, the package assembly may include a plurality of MEMS coupled directly to the ASIC by way of a plurality of one or more interconnects. Other embodiments may be described and/or claimed.

CROSS REFERENCE TO RELATED APPLICATIONS

The present application is a continuation of U.S. application Ser. No.15/484,765, filed Apr. 11, 2017, entitled “MICROELECTROMECHANICAL SYSTEM(MEMS) ON APPLICATION SPECIFIC INTEGRATED CIRCUIT (ASIC)” which is adivisional of U.S. application Ser. No. 14/403,571, filed Nov. 24, 2014,entitled “MICROELECTROMECHANICAL SYSTEM (MEMS) ON APPLICATION SPECIFICINTEGRATED CIRCUIT (ASIC)”, now U.S. Pat. No. 9,663,353, issued May 30,2017, which is a national phase entry under 35 U.S.C. § 371 ofInternational Application No. PCT/US2013/048552, filed Jun. 28, 2013,entitled “MICROELECTROMECHANICAL SYSTEM (MEMS) ON APPLICATION SPECIFICINTEGRATED CIRCUIT (ASIC)”, which designated, among the various States,the United States of America. The Specification of thePCT/US2013/048552, U.S. patent application Ser. No. 14/403,571, and U.S.patent application Ser. No. 15/484,765 Applications are herebyincorporated by reference.

FIELD

Embodiments of the present disclosure generally relate to the field ofelectronic device components, and more particularly, to methods andapparatuses for assembling packages for mobile devices.

BACKGROUND

Microelectromechanical systems (MEMS) are a field of growth in theglobal semiconductor business. MEMS components and sensors may be usedin the fast-growing mobile phone and tablet industry. In many products,a MEMS may be wire-bonded with a separate lid/cap element. The lid/capelement may increase the package size of the MEMS, and require anadditional manufacturing step which may increase the overall cost of thepackage.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates a top-down view of a MEMS with an interconnectcoupled with an application-specific integrated circuit (ASIC), inaccordance with embodiments.

FIG. 2 illustrates an example configuration of an active side of a MEMScommunicatively coupled with an ASIC, in accordance with embodiments.

FIGS. 3, 4, 5, 6, 7, 8, and 9 illustrate examples of a multi-MEMS ASIC,in accordance with embodiments.

FIG. 10 illustrates a flowchart for manufacturing a package with a MEMS,in accordance with embodiments.

FIG. 11 schematically illustrates a computing device, in accordance withembodiments

DETAILED DESCRIPTION

As noted above, in existing packages a MEMS may be coupled with alid/cap element which in turn may be coupled with an ASIC. The lid/capelement may increase the cost and manufacturing complexity of thepackage. In embodiments described herein, the MEMS may instead becoupled directly with the ASIC. Specifically, the MEMS may be coupledwith, or otherwise include, an interconnect. The interconnect may becoupled directly to the ASIC. The MEMS, interconnect, and ASIC may forma cavity such that the active side of the MEMS is inside of the cavity.In some embodiments, a plurality of MEMS may be coupled with the sameASIC. These embodiments and other embodiments disclosed herein mayprovide the advantages of having a smaller size as well as reduced costand a faster manufacturing time.

In the following detailed description, reference is made to theaccompanying drawings which form a part hereof, wherein like numeralsdesignate like parts throughout, and in which is shown by way ofillustration embodiments in which the subject matter of the presentdisclosure may be practiced. It is to be understood that otherembodiments may be utilized and structural or logical changes may bemade without departing from the scope of the present disclosure.Therefore, the following detailed description is not to be taken in alimiting sense, and the scope of embodiments is defined by the appendedclaims and their equivalents.

For the purposes of the present disclosure, the phrase “A and/or B”means (A), (B), or (A and B). For the purposes of the presentdisclosure, the phrase “A, B, and/or C” means (A), (B), (C), (A and B),(A and C), (B and C), or (A, B and C).

The description may use perspective-based descriptions such astop/bottom, in/out, over/under, and the like. Such descriptions aremerely used to facilitate the discussion and are not intended torestrict the application of embodiments described herein to anyparticular orientation.

The description may use the phrases “in an embodiment,” or “inembodiments,” which may each refer to one or more of the same ordifferent embodiments. Furthermore, the terms “comprising,” “including,”“having,” and the like, as used with respect to embodiments of thepresent disclosure, are synonymous.

The term “coupled with,” along with its derivatives, may be used herein.“Coupled” may mean one or more of the following. “Coupled” may mean thattwo or more elements are in direct physical or electrical contact.However, “coupled” may also mean that two or more elements indirectlycontact each other, but yet still cooperate or interact with each other,and may mean that one or more other elements are coupled or connectedbetween the elements that are said to be coupled with each other. Theterm “directly coupled” may mean that two or elements are in directcontact.

In various embodiments, the phrase “a first feature formed, deposited,or otherwise disposed on a second feature,” may mean that the firstfeature is formed, deposited, or disposed over the feature layer, and atleast a part of the first feature may be in direct contact (e.g., directphysical and/or electrical contact) or indirect contact (e.g., havingone or more other features between the first feature and the secondfeature) with at least a part of the second feature.

Various operations may be described as multiple discrete operations inturn, in a manner that is most helpful in understanding the claimedsubject matter. However, the order of description should not beconstrued as to imply that these operations are necessarily orderdependent.

As used herein, the term “module” may refer to, be part of, or includean ASIC, an electronic circuit, a processor (shared, dedicated, orgroup) and/or memory (shared, dedicated, or group) that execute one ormore software or firmware programs, a combinational logic circuit,and/or other suitable components that provide the describedfunctionality.

FIG. 1 depicts a top-down view of an example of a package 100 includinga MEMS 105 coupled directly with an ASIC 110. The ASIC 110 isillustrated using a dashed line to indicate that the MEMS is transparentin FIG. 1 to avoid obscuring the underlying elements such as the MEMS105. As shown in FIG. 1, the MEMS 105 may be smaller than the ASIC 110,however in other embodiments the MEMS 105 may be the same size as, orlarger than, the ASIC 110. The MEMS 105 may be coupled with or includean interconnect 115. In embodiments, the interconnect 115 may beconstructed of an electrically neutral or insulative material such as asa non-conducting paste (NCP), non-conducting film (NCF), insulatingdie-attach film (DAF), or some other electrically neutral or insulativematerial. In other embodiments, the interconnect 115 may be constructedof an electrically conductive material such as flip-chip soldering (FCsoldering) or any other electrically conductive paste. As shown in FIG.1, the interconnect 115 may be smaller than one or both of the MEMS 105or the ASIC 110. However, in other embodiments, the interconnect 115 maybe the same size as the MEMS 105 and/or the interconnect 115. In someembodiments, the interconnect 115 may be generally rectangular orsquare, while in other embodiments the interconnect 115 may have adifferent shape such as a generally round shape, a triangular shape, orsome other shape. In some embodiments, the interconnect 115 maygenerally be a singular piece of material, while in other embodimentsthe interconnect 115 may be a plurality of materials, for examplemultiple elements such as a plurality of solder balls, that are fusedtogether to form a singular shape.

An ASIC, for example ASIC 110, may be an ASIC die. For example, the ASIC110 may include one or more circuits embedded within and/or upon asubstrate such as silicon, gallium arsenide, SiC (silicon carbide)graphene or any organic semiconductor material. In some embodiments, theASIC 110 may be a general circuit, which may alternatively be referredto as an integrated circuit. In other embodiments, the ASIC 110 may bedirected toward a specific application. For example, the circuitry ofthe ASIC 110 may be specifically configured to perform a given processor function. In some embodiments, the circuitry of the ASIC 110 may bespecifically configured such that the function or process of the ASIC110 corresponds to the type of MEMS, for example MEMS 105, which is tobe mounted to the ASIC 110. Although the term ASIC 110 is used in thisspecification to describe embodiments, in other embodiments the ASIC mayrefer to a processor, a physical memory, or some other component.

In embodiments, a MEMS, for example MEMS 105 may be a gyroscope todetermine an orientation of the MEMS, the package containing the MEMS,or a device incorporating the package. In some embodiments, the MEMS maybe an accelerometer to determine motion of the MEMS, the packagecontaining the MEMS, or a device incorporating the package. In someembodiments, the MEMS may be a magnetometer to determine magnetic fieldat or near the MEMS, the package containing the MEMS, or a deviceincorporating the package. In some embodiments, the MEMS may be amicrophone to identify sound at or near the MEMS, the package containingthe MEMS, or a device incorporating the package. In some embodiments,the MEMS may be a filter to filter an electric signal. In someembodiments, the MEMS may be an oscillator to modulate or alter anelectric signal. In some embodiments, the MEMS may be a pressure sensorto determine a change in pressure such as atmospheric pressure near theMEMS, the package containing the MEMS, or a device incorporating thepackage. In some embodiments, the MEMS may be a radio frequencyidentification (RFID) chip configured to operate in an RFID system. Insome embodiments, the MEMS may be a speaker configured to make a noise.In some embodiments, the MEMS may be some other device. In embodiments,the MEMS may refer to a die or an element of a die. In otherembodiments, the MEMS may be a component that would not generally beconsidered or called a die.

As noted with respect to FIG. 1, the MEMS 105 may be coupled to aninterconnect 115, while in other embodiments the MEMS 105 may include orotherwise be integrated with the interconnect 115. Alternatively, theASIC 110 may be coupled to the interconnect 115, while in otherembodiments the ASIC 110 may include or otherwise be integrated with theinterconnect 115.

FIG. 2 depicts a cross-section side view of an example of a package 200including a MEMS 205 coupled directly with an ASIC 210. In embodiments,the MEMS 205 may be similar to the MEMS 105 of FIG. 1, and the ASIC 210may be similar to the ASIC 110 of FIG. 1. The package 200 may furtherinclude an interconnect 215, which may comport with embodimentsdescribed in connection with interconnect 115 of FIG. 1 and which may beconfigured to couple the MEMS 205 to the ASIC 210. In embodiments, theMEMS 205, the interconnect 215, and the ASIC 210 may generally define acavity 203.

In embodiments, the MEMS 205 may include an active side 220 and aninactive side 225. In embodiments, the active side 220 may be called a“frontside” and the inactive side 225 may be called a “backside” of theMEMS 205. In embodiments, the active side 220 of the MEMS 205 mayinclude processing circuitry (not shown in FIG. 2) and electricallyconductive MEMS contacts of the MEMS 205. In some embodiments, the MEMScontacts may be generally within the cavity 203, for example MEMScontacts 230. In other embodiments, the MEMS contacts may be on orwithin the active side 220 of the MEMS 205 outside of the cavity 203,for example MEMS contacts 235.

In embodiments, the circuitry of the MEMS 205 may be susceptible tophysical and or electrical disruption. In embodiments the circuitry ofthe MEMS 205 may include processing circuitry, sensors, or othersensitive devices disposed on or within the MEMS 205. For example, ifthe circuitry of the MEMS 205 is in physical contact with anothermaterial, for example an overmold or underfill material, then thecircuitry of the MEMS 205 may experience interference and not functionas desired. Therefore, it may be desirable for the cavity 203 to be avacuum, be filled with an inert gas, or be an air cavity. In someembodiments, the cavity may not be completely sealed by the MEMS 205and/or the ASIC 210 and may be configured to, for example, receive soundwaves through the MEMS 205 and/or ASIC 210 such that the sound waves maybe processed by circuitry on or in the active side 220 of the MEMS 205such as microphone circuitry. Generally, because the circuitry of theMEMS 205 may be within the cavity 203, then the circuitry may beprotected from physical contact with other materials by the combinationof the MEMS 205, the interconnect 215, and the ASIC 210.

In embodiments, the circuitry on the active side 220 of the MEMS 205,which is not shown in FIG. 2, may be coupled with one or more of theMEMS contacts 230 or 235 The MEMS contacts 235 may be coupled with ASICcontacts which may be outside of the cavity 203 such as, for example,ASIC contacts 240. Additionally or alternatively, the MEMS contacts 230may be coupled with ASIC contacts inside of the cavity 203, such as, forexample ASIC contacts 245. In embodiments, the MEMS contacts 230 or 235and the ASIC contacts 240 or 245 may be coupled to one another via oneor more die-level interconnects such as a conductive solder ball. Forexample, a MEMS contact 230 or 235 may be coupled to an ASIC contact 240or 245 through a die-level interconnect such as a solder ball 255 whichmay be configured to transfer an electrical signal from the MEMS contact230 or 235 to an ASIC contact 240 or 245. It will be understood thatalthough the solder ball 255 is depicted as generally round, in otherembodiments it may have a different shape. In embodiments, the solderball 255 may be or include tin, lead, silver, or some alloy of thesematerials or other similar materials. The MEMS 205 and the ASIC 210 maybe coupled using other suitable die-interconnect structures in otherembodiments including, for example, bumps, flip-chip style bumps,pillars and the like.

As shown in FIG. 2, the MEMS 205 may be coupled directly with the ASIC210 by way of the interconnect 215. By coupling the MEMS 205 directlywith the ASIC 210 and forming the cavity 203, a number of advantages maybe realized. Specifically, the ASIC 210 may take the place of thecommonly used lid/cap discussed above, which may be typically used toprotect the active side 220 of the MEMS 205. By removing a separatelid/cap from the package 200, the manufacturing process may besimplified which may result in a package that may be easier, faster, andcheaper to manufacture.

FIG. 3 depicts a cross-sectional view of an example of a package 300including a MEMS 305, which may be similar to MEMS 105 in FIG. 1. Thepackage 300 may also include an ASIC 310, which may be similar to ASIC110 in FIG. 1. The MEMS 305 may be coupled with the ASIC 310 by way ofan interconnect 315, which may be similar to interconnect 115 of FIG. 1.In embodiments, the MEMS 305 and/or ASIC 310 may include MEMS contacts230 or 235, or ASIC contacts 240 or 245, which are not shown in FIG. 3for clarity. Additionally, the MEMS 305 may be coupled with the ASIC 310by way of one or more of the die-level interconnects described in FIG.2, which are not shown in FIG. 3 for clarity.

In embodiments, the ASIC 310 may have an active side 320 and an inactiveside 325. Similarly to the MEMS 305, the active side 320 of the ASIC 310may include circuitry, while the inactive side 325 of the ASIC 310 maynot include circuitry. Similarly to the MEMS, the circuitry of the ASIC310 may include processing circuitry, sensors, and/or other sensitivedevices disposed on or within the ASIC 310 In the package 300 of FIG.300, the MEMS 305 and interconnect 315 may be coupled with the activeside 320 of the ASIC 310. In embodiments, the active side may includeone or more redistribution layers (RDLs) 330 and 335. In embodiments,the RDL 330 may be generally flush with the active side 320 of the ASIC310. Additionally or alternatively, the RDL 335 may extend from theactive side 320 of the ASIC 310 or be embedded within the ASIC 310. Inembodiments, the interconnect 315 may be coupled to the ASIC 310 by wayof one or more of the RDLs 330 or 335. In some embodiments, the RDLs 330or 335 may be electrically conductive and configured to carry anelectrical signal. In embodiments, the RDLs 330 or 335 may include or bemade of a conductive metal such as gold, copper, silver, or some alloythereof. In some embodiments (not shown), the RDLs 330 or 335 may becovered by a dielectric or electrically neutral or insulative materialsuch as silicon nitride, silicon oxide, a polyimide, or some combinationthereof. The RDLs 330 or 335 may be composed of other suitableelectrically conductive or electrically neutral/insulative materials inother embodiments.

As used herein, the MEMS 305 and the interconnect 315 may be called aMEMS structure 340. As shown in FIG. 3, the package 300 may include morethan one MEMS structure 340. For example, the package 300 may includethree MEMS structures 340, which may be electrically isolated from eachother, or at least two of the MEMS structures 340 may be in electricalcommunication with the ASIC 310. In embodiments, the MEMS structure 340may be in contact with one or more of the RDLs 330 or 335, or coupleddirectly with the ASIC 310.

In embodiments, the ASIC 310 may be coupled with one or morepackage-level interconnects 345. In embodiments, the package-levelinterconnects 345 may be a solder material such as the solder materialdiscussed with respect to solder ball 255 in FIG. 2. In otherembodiments, the package-level interconnects 345 may include wirebondwires which may be may be or include silver, copper, gold, or some otheralloy of these materials or other similar materials. The package-levelinterconnects 345 may include other suitable interconnect structures inother embodiments. As noted above, in some embodiments, the RDLs 330 or335 may be electrically conductive and configured to carry a signal. Inembodiments, the RDLS 330 or 335 may carry the signal from a MEMSstructure 340 through the RDL 330 or 335 and to the package-levelinterconnects 345. The package-level interconnects 345 may also beelectrically conductive and configured to carry the signal from thepackage 300 to a computer board (e.g., circuit board such as amotherboard) or other electrical circuit (e.g., package substrate) towhich the package 300 is coupled using the package-level interconnects345.

FIG. 4 depicts a cross-sectional view of an alternative embodiment of apackage 400 including a MEMS structure 440, which may be similar to MEMSstructure 340 in FIG. 3 and include a MEMS and interconnect, which maybe similar to MEMS 305 and interconnect 315, respectively. The package400 may also include an ASIC 410, which may be similar to ASIC 310 inFIG. 3. In embodiments, the MEMS structure 440 and/or ASIC 410 mayinclude MEMS contacts 230 or 235, or ASIC contacts 240 or 245, which arenot shown in FIG. 4 for clarity. Additionally, the MEMS of the MEMSstructure 440 may be coupled with the ASIC 410 by way of one or more ofthe die-level interconnects described in FIG. 2, which are not shown inFIG. 4 for clarity.

In embodiments, the ASIC 410 may include one or more RDL/TSVs 430, whichare described below in further detail. In embodiments, the MEMSstructures 440 may be coupled with a first side 470 of the ASIC 410. Inembodiments, one or more package-level interconnects 445 may be coupledwith a second side 475 of the ASIC 410 opposite the first side 470. Inone embodiment, the first side 470 may be the active side of the ASIC410, which may be similar to the active side 320 of the ASIC 310 of FIG.3. In this embodiment, the second side 475 of the ASIC 410 may be theinactive side of the ASIC 410, which may be similar to the inactive side325 of the ASIC 310 of FIG. 3. In other embodiments, the first side 470may be the inactive side of the ASIC 410, while the second side 475 maybe the active side of the ASIC 410.

In embodiments, the signal may be transmitted from the first side 470 ofthe ASIC 410 to the second side 475 of the ASIC 410 by way of one ormore through silicon vias (TSVs) which are shown as integrated with twoRDLs in FIG. 4. Specifically, an RDL/TSV 430 may refer to an integratedstructure which includes an RDL 430 a on the second side 475 of the ASIC410, an RDL 430 b on the first side 470 of the ASIC 410, and a TSV 430 ccoupling the two RDLs 430 a and 430 b to one another. However, for easeof reference herein, the RDLs 430 a and 430 b, and the TSV 430 c, arereferred to as a singular RDL/TSV 430. The RDL/TSVs 430 may beelectrically conductive and configured to carry a signal from a MEMS ofa MEMS structure 440 through the RDL/TSV 430 to a package-levelinterconnect 445 configured to carry the signal from the package 400 toa computer board or other electrical circuit to which the package 400 iscoupled. The ASIC 410 may include more or fewer RDLs than depictedand/or alternative means for routing electrical signals between thefirst side 470 and the second side 475 such as, for example, trenches orvias that form one or more interconnect layers between the first side470 and the second side 475.

FIG. 5 depicts a cross-sectional view of an alternative embodiment of apackage 500 including a MEMS structure 540, which may be similar to MEMSstructure 440 in FIG. 4 and include a MEMS 505 and interconnect, whichmay be similar to MEMS 305 and interconnect 315, respectively. Thepackage 500 may also include an ASIC 510, which may be similar to ASIC410 in FIG. 4. In embodiments, one or more of the MEMS structures 540may be coupled with one or more package-level interconnects 545, whichmay be similar to package-level interconnects 445 of FIG. 4, by way ofone or more RDL/TSVs 530, which may be similar to an RDL/TSV 430 of FIG.4. The ASIC 510 may have a first side 570, which may be similar to thefirst side 470 of the ASIC 410 of FIG. 4, and a second side 575, whichmay be similar to the second side 475 of the ASIC 410 of FIG. 4.

In the embodiment shown in FIG. 5, the MEMS 505 of the MEMS structure540 may not include MEMS contacts 230 or 235. Additionally oralternatively, the ASIC 510 may not include ASIC contacts such as ASICcontacts 240 or 245. In some embodiments, at least some of the MEMScontacts 230 or 235, or ASIC contacts 240 or 245, may be present.Therefore, the MEMS 505 may include one or more TSVs 560 which areconfigured to carry an electrical signal from the active side 520 of theMEMS 505, through the body of the MEMS 505, to a second side of the MEMS(not labeled in FIG. 5 for clarity). In embodiments, the TSVs 560 maythen be coupled with one or more of the RDL/TSVs 530 via wirebonds 565,which may be or include silver, copper, gold, or some other alloy ofthese materials or other similar materials. In this manner, anelectrical signal may be carried from the active side 520 of the MEMS505, through the TSVs 560, to the wirebonds 565. The signal may thentravel through the wirebonds 565 to the RDL/TSVs 530, and from theRDL/TSVs 530 to a circuit board or other electrical circuit via apackage-level interconnect 545. In embodiments, the MEMS structure 540may be coupled with a first side 570 of the ASIC 510 while thepackage-level interconnects 545 are coupled with the second side 575 ofthe ASIC 510. In some embodiments, the first side 570 may be an activeside of the ASIC 510 while the second side 575 may be an inactive sideof the ASIC 510. In other embodiments, the first side 570 may be aninactive side of the ASIC 510 while the second side 575 may be an activeside of the ASIC 510.

FIG. 6 depicts a cross-sectional view of an alternative embodiment of apackage 600 including a MEMS structure 640, which may be similar to MEMSstructure 340 in FIG. 3 and include a MEMS and interconnect, which maybe similar to MEMS 305 and interconnect 315, respectively. The package600 may also include an ASIC 610, which may be similar to ASIC 310 inFIG. 3. In embodiments, the MEMS structure 640 and/or ASIC 610 mayinclude MEMS contacts 230 or 235, or ASIC contacts 240 or 245, which arenot shown in FIG. 4 for clarity. Additionally, the MEMS of the MEMSstructure 640 may be coupled with the ASIC 410 by way of one or more ofthe die-level interconnects described in FIG. 2, which are not shown inFIG. 6 for clarity. The ASIC 610 may have an active side 620 and aninactive side 625, which may be respectively similar to active side 320and inactive side 325, respectively.

In embodiments, the ASIC 610 may be at least partially covered by a moldcompound 680. In some embodiments, the package 600 may be considered tobe an embedded wafer level ball grid array (eWLB) package. Inembodiments, the mold compound 680 may be made of or include any epoxybased material including varous reinforcements and fillers. The moldcompound 680 may be composed of other suitable materials in otherembodiments.

In some embodiments, one or more RDLs such as RDL 630 a may be disposedinside of or otherwise coupled to the mold compound 680 rather than theASIC 610. Other RDLs, for example RDLs 630 may be disposed inside of orotherwise coupled to the ASIC 610, for example as described above withrespect to RDLs 330 or 335. The coupling of the RDL 630 a to the moldcompound 680 may increase the fan-out area of the package 600. Thefan-out area may be considered the lateral area occupied by the package600, and increasing the fan-out area may allow more components to becoupled with the package, provide better structural support, or providebetter heat distribution of the package 600. As shown in FIG. 6, atleast one of the package-level interconnects 645 a may likewise becoupled directly to the mold compound 680, while other package-levelinterconnects 645 are coupled with an RDL such as RDLs 630 a or 630, ordirectly to the ASIC 610.

FIG. 7 depicts a cross-sectional view of an alternative embodiment of apackage 700 including a MEMS structure 740, which may be similar to MEMSstructure 340 in FIG. 3 and include a MEMS and interconnect, which maybe similar to MEMS 305 and interconnect 315, respectively. The package700 may also include an ASIC 710, which may be similar to ASIC 310 inFIG. 3. In embodiments, the MEMS structure 740 and/or ASIC 710 mayinclude MEMS contacts 230 or 235, or ASIC contacts 240 or 245, which arenot shown in FIG. 7 for clarity. Additionally, the MEMS of the MEMSstructure 740 may be coupled with the ASIC 710 by way of one or more ofthe die-level interconnects described in FIG. 2, which are not shown inFIG. 7 for clarity. The ASIC 710 may have an active side 720 and aninactive side 725, which may be respectively similar to active side 320and inactive side 325, respectively. Additionally, the package 700 mayinclude one or more package-level interconnects 745 which may be coupledwith an RDL 730 of the package 700 and/or directly to the ASIC 710.

The ASIC 710 may include a cavity 785 in the active side 720 of the ASIC710. The cavity may be chemically, mechanically, or laser etched,ablated, or otherwise formed in the active side 720 of the ASIC eitherduring the manufacturing of the ASIC 710 or after the ASIC 710 ismanufactured. In embodiments, an RDL 730 may extend into the cavity 785,and be coupled with a MEMS structure 740 inside of the cavity 785. Inother embodiments, a MEMS structure 740 may be coupled directly with theASIC 710 inside of the cavity 785. Although the cavity 785 is shown asangular with respect to the ASIC 710, in other embodiments the walls ofthe cavity 785 may be perpendicular to the active side 720 of the ASIC710, rounded, or have some other shape or configuration. Additionally,even though a single cavity 785 is shown in FIG. 7, in other embodimentsthe ASIC 710 may include a plurality of cavities such as cavity 785. Inembodiments, one or more cavities such as cavity 785 may providedifferent advantages. For example, the cavity 785 may reduce thethickness of a package such as package 700. Additionally, disposing aMEMS structure 740 inside of a cavity 785 may provide protection for aparticular physically sensitive MEMS, because the cavity may make itmore difficult for an outside object to come in contact with the MEMSand/or MEMS structure 740.

FIG. 8 depicts a cross-sectional view of an alternative embodiment of apackage 800 including a MEMS structure 840, which may be similar to MEMSstructure 540 in FIG. 5 and include a MEMS 805 and an interconnect,which may be similar to MEMS 505 and interconnect 315, respectively. Thepackage 800 may also include an ASIC 810, which may be similar to ASIC510 in FIG. 5. In embodiments, the MEMS 805 and/or ASIC 810 may includeMEMS contacts 230 or 235, or ASIC contacts 240 or 245, which are notshown in FIG. 8 for clarity. Additionally, the MEMS 805 may be coupledwith the ASIC 810 by way of one or more of the die-level interconnectsdescribed in FIG. 2, which are not shown in FIG. 8 for clarity. The ASIC810 may have an active side 821 and an inactive side 826, which may berespectively similar to active side 320 and inactive side 325 of FIG. 3,respectively.

In embodiments, one or more of the MEMS structures 840 may include aMEMS 805 with a TSV 860, which may be similar to the TSVs 560 of FIG. 5.In some embodiments, one or more of the package-level interconnects 845a, which may be similar to package-level interconnects 545 of FIG. 5,may be coupled directly with an inactive side 825 of the MEMS 805. Inembodiments, a TSV 860 of a MEMS 805 may be configured to carry anelectrical signal from the active side 820 of the MEMS 805 through thebody of the MEMS 805 and to the one or more package-level interconnects845 a. In embodiments, the TSV 860 may be additionally coupled with aninterconnect (not labeled for clarity) of the MEMS structure 840. Inembodiments, the TSV 860 may be configured to carry an electrical signalbetween one or more of the RDL 830, through a MEMS contact or theinterconnect, and to or from one or more of the package-levelinterconnects 845 a.

In some embodiments, other package-level interconnects 845 b, which maybe similar to package-level interconnects 545 of FIG. 5, may be coupleddirectly with the ASIC 810 or an RDL 830 of the ASIC 810. In someembodiments, the package-level interconnects 845 a and 845 b may bedifferent sizes such that the package 800 has a relatively evensurface-mount level. In other words, the package-level interconnects 845a and 845 b may be different sizes such that each package-levelinterconnect 845 a and 845 b have a relatively similar lowest point withrespect to the package 800, as depicted. In some embodiments, at leasttwo of the package-level interconnects may be the same size as oneanother, for example the two package-level interconnects 845 a or thetwo package-level interconnects 845 b.

FIG. 9 depicts a cross-sectional view of an alternative embodiment of apackage 900 including a MEMS structure 940, which may be similar to MEMSstructure 340 in FIG. 3 and include a MEMS and interconnect, which maybe similar to MEMS 305 and interconnect 315, respectively. The package900 may also include an ASIC 910, which may be similar to ASIC 310 inFIG. 3. In embodiments, the MEMS structure 940 and/or ASIC 910 mayinclude MEMS contacts 230 or 235, or ASIC contacts 240 or 245, which arenot shown in FIG. 9 for clarity. Additionally, the MEMS of the MEMSstructure 940 may be coupled with the ASIC 910 by way of one or more ofthe die-level interconnects described in FIG. 2, which are not shown inFIG. 9 for clarity. The ASIC 910 may have an active side 920 and aninactive side 925, which may be respectively similar to active side 320and inactive side 325, respectively. Additionally, the package 900 mayinclude one or more package-level interconnects 945 which may be coupledwith an RDL 930 or 930 a of the package 900 and/or directly to the ASIC910. The one or more package-level interconnects 945 may be similar topackage-level interconnects 345.

In embodiments, one or more of the MEMS structures 940 may be at leastpartially surrounded by or otherwise coupled with an underfill material990. In embodiments, the underfill material 990 may be composed of anyepoxy based material with or without filler. As described above, it maybe desirable for the cavity 903 of the MEMS structure 940 to begenerally sealed such that other materials can not intrude into thecavity 903 and contact the active surface of the MEMS. The underfillmaterial 990 may be disposed on the package 900 and at least partiallysurround or cover the MEMS structure 940 to hermetically seal orotherwise protect the MEMS structure 940. In other words, the underfillmaterial 990 may act as another barrier against an undesirable materialentering the cavity 903 of the MEMS structure 940. Although only asingle MEMS structure 940 is shown coupled with an underfill material990, in other embodiments each MEMS structure 940, or at least more thanone MEMS structure 940 on the package 900, may be coupled with orotherwise at least partially surrounded by the underfill material 990.

In some embodiments an RDL such as RDL 930 a may span across an entireMEMS structure 940 to generally fully cover the cavity 903 of the MEMSstructure 940. In embodiments, this RDL 930 a may serve a purposesimilar to that of the underfill material 990 in that it may assist inhermetically sealing the cavity 903 so that undesirable materials cannot enter into the cavity 903.

In some embodiments, the active side 920 of the ASIC 910 may be coveredby an overmold or frontside mold material 980, which may be similar tothe mold compound 680 of FIG. 6. In embodiments, the underfill material990 and/or extended RDL 930 a may prevent the overmold material 980 fromentering into the cavity 903 of the MEMS structure 940. In otherembodiments, the overmold material 980 may serve a similar purpose asdescribed with underfill material 990 in that it may assist inhermetically sealing the cavity 903 so that undesirable materials cannot enter into the cavity 903

The above described example embodiments are intended to be examples, andare not intended to be limiting or exclusive of other embodiments.Features of some embodiments may be combined or missing from otherembodiments. For example, in some embodiments the package 900 of FIG. 9may not include the overmold material 980. In other embodiments, thepackage 900 may not include the RDL 930 a spanning an entire MEMSstructure 940. Some embodiments may include a combination of features.For example, a package such as package 900 may include the MEMS TSVs 560and wirebonds 565 of FIG. 5. In embodiments where certain elements, forexample the MEMS structures 740 or the cavity 785 are described as beingon an active side of the ASIC such as ASIC 710, in other embodiments theMEMS structures 740 and/or cavity 785 may be additionally oralternatively located on the inactive side 725 of the ASIC 710, andcoupled to the package-level interconnects 745 by way of RDL/TSVs suchas RDL/TSV 430. Other combinations of features, or exclusions offeatures, may be realized in other embodiments.

In some embodiments, different types of MEMS may be coupled with thesame ASIC. For example, with reference to FIG. 3, MEMS 305 may be anaccelerometer. In addition, one of the MEMS in another MEMS structure340 may be a gyroscope while a MEMS in a third MEMS structure 340 may bea magnetometer. In other embodiments, at least two of the same type ofMEMS may be coupled to an ASIC such as ASIC 310. For example, an ASIC310 may be coupled with two speaker-type MEMS and a singlemicrophone-type MEMS. In other embodiments, different suitablecombinations of MEMS may combined so that different MEMS with differentfunctions may be coupled to the same ASIC such as ASIC 310.

FIG. 10 depicts an example of a manufacturing process for constructing apackage such as packages 100, 200, 300, 400, 500, 600, 700, 800, or 900.In embodiments, a MEMS may be coupled to one or more interconnects at1000. The MEMS may be a MEMS such as MEMS 105, 205, 305, 505, or 805.The one or more interconnects may be one or more interconnects such asinterconnect 115, 215, or 315. In some embodiments, as noted above, theMEMS may be coupled to the interconnect during manufacturing of theMEMS. In other embodiments, the MEMS may be coupled to the interconnectafter the MEMS is manufactured.

The one or more interconnects may be coupled to an ASIC such as ASIC110, 210, 310, 410, 510, 610, 710, 810, or 910 at 1010. In embodiments,the one or more interconnects may be an element of the ASIC, which iscoupled to the ASIC either during manufacture of the ASIC or after theASIC is manufactured. In some embodiments, the one or more interconnectsmay be coupled to the ASIC 110 prior to coupling the MEMS to the one ormore interconnects at 1000. The example manufacturing process may not beorder dependent in embodiments.

In some embodiments, the one or more interconnects may be coupled to oneor both of the MEMS or ASIC via processes such as solderreflow,thermocompression bonding, or lamination.

Embodiments of the present disclosure may be implemented into a systemusing any suitable hardware and/or software to configure as desired.FIG. 11 schematically illustrates a computing device 1100 in accordancewith one implementation of the invention. The computing device 1100 mayhouse a board such as motherboard 1102 (e.g., housing 1152). Themotherboard 1102 may include a number of components, including but notlimited to a processor 1104 and at least one communication chip 1106.The processor 1104 may be physically and electrically coupled to themotherboard 1102. In some implementations, the at least onecommunication chip 1106 may also be physically and electrically coupledto the motherboard 1102. In further implementations, the communicationchip 1106 may be part of the processor 1104.

Depending on its applications, computing device 1100 may include othercomponents that may or may not be physically and electrically coupled tothe motherboard 1102. These other components may include, but are notlimited to, volatile memory (e.g., DRAM), non-volatile memory (e.g.,ROM), flash memory, a graphics processor, a digital signal processor, acrypto processor, a chipset, an antenna, a display, a touchscreendisplay, a touchscreen controller, a battery, an audio codec, a videocodec, a power amplifier, a global positioning system (GPS) device, acompass, an accelerometer, a gyroscope, a speaker, a camera, and a massstorage device (such as hard disk drive, compact disk (CD), digitalversatile disk (DVD), and so forth). Further components, not shown inFIG. 11, may include a microphone, a filter, an oscillator, a pressuresensor, or an RFID chip. In embodiments, one or more of the componentsmay be a MEMS such as MEMS 105, 205, 305, 505, or 805, or a MEMSstructure such as MEMS structures 340, 440, 540, 640, 740, 840, or 940.In some embodiments one or more of the components may be a general termfor a package such as packages 100, 200, 300, 400, 500, 600, 700, 800,or 900 that contain one or more of the components.

The communication chip 1106 may enable wireless communications for thetransfer of data to and from the computing device 1100. The term“wireless” and its derivatives may be used to describe circuits,devices, systems, methods, techniques, communications channels, etc.,that may communicate data through the use of modulated electromagneticradiation through a non-solid medium. The term does not imply that theassociated devices do not contain any wires, although in someembodiments they might not. The communication chip 1106 may implementany of a number of wireless standards or protocols, including but notlimited to Institute for Electrical and Electronic Engineers (IEEE)standards including Wi-Fi (IEEE 802.11 family), IEEE 802.16 standards(e.g., IEEE 802.16-2005 Amendment), Long-Term Evolution (LTE) projectalong with any amendments, updates, and/or revisions (e.g., advanced LTEproject, ultra mobile broadband (UMB) project (also referred to as“3GPP2”), etc.). IEEE 802.16 compatible BWA networks are generallyreferred to as WiMAX networks, an acronym that stands for WorldwideInteroperability for Microwave Access, which is a certification mark forproducts that pass conformity and interoperability tests for the IEEE802.16 standards. The communication chip 1106 may operate in accordancewith a Global System for Mobile Communication (GSM), General PacketRadio Service (GPRS), Universal Mobile Telecommunications System (UMTS),High Speed Packet Access (HSPA), Evolved HSPA (E-HSPA), or LTE network.The communication chip 1106 may operate in accordance with Enhanced Datafor GSM Evolution (EDGE), GSM EDGE Radio Access Network (GERAN),Universal Terrestrial Radio Access Network (UTRAN), or Evolved UTRAN(E-UTRAN). The communication chip 1106 may operate in accordance withCode Division Multiple Access (CDMA), Time Division Multiple Access(TDMA), Digital Enhanced Cordless Telecommunications (DECT),Evolution-Data Optimized (EV-DO), derivatives thereof, as well as anyother wireless protocols that are designated as 3G, 4G, 5G, and beyond.The communication chip 1106 may operate in accordance with otherwireless protocols in other embodiments.

The computing device 1100 may include a plurality of communication chips1106. For instance, a first communication chip 1100 may be dedicated toshorter range wireless communications such as Wi-Fi and Bluetooth and asecond communication chip 1106 may be dedicated to longer range wirelesscommunications such as GPS, EDGE, GPRS, CDMA, WiMAX, LTE, Ev-DO, andothers.

The processor 1104 of the computing device 1100 may include asemiconductor die in an IC package assembly. The term “processor” mayrefer to any device or portion of a device that processes electronicdata from registers and/or memory to transform that electronic data intoother electronic data that may be stored in registers and/or memory.

The communication chip 1106 may also include a die in an IC packageassembly. In further implementations, another component (e.g., memorydevice or other integrated circuit device) housed within the computingdevice 1100 may contain a die in an IC package assembly.

In various implementations, the computing device 1100 may be a laptop, anetbook, a notebook, an ultrabook, a smartphone, a tablet, a personaldigital assistant (PDA), an ultra mobile PC, a mobile phone, a desktopcomputer, a server, a printer, a scanner, a monitor, a set-top box, anentertainment control unit, a digital camera, a portable music player,or a digital video recorder. In further implementations, the computingdevice 1100 may be any other electronic device that processes data, forexample an all-in-one device such as an all-in-one fax or printingdevice.

Examples

Example 1 may include a package assembly comprising: anapplication-specific integrated circuit (ASIC) having an active side andan inactive side opposite the active side; a microelectromechanicalsystem (MEMS) having an active side and an inactive side; and one ormore interconnects; wherein the MEMS is coupled directly to the ASICthrough the one or more interconnects; and wherein the MEMS, the ASIC,and the one or more interconnects form a cavity between the MEMS, theASIC, and the one or more interconnects.

Example 2 may include the package assembly of example 1, wherein theMEMS is a first MEMS, the cavity is a first cavity, and the one or moreinterconnects are first one or more interconnects, the package assemblyfurther comprising: a second MEMS; and a second one or moreinterconnects; wherein the second MEMS is coupled directly to the ASICthrough the second one or more interconnects, wherein the second MEMS,the ASIC, and the second one or more interconnects form a second cavitybetween the second MEMS, the ASIC, and the second one or moreinterconnects.

Example 3 may include the package assembly of example 2, wherein thefirst MEMS is a gyroscope, an accelerometer, a magnetometer, amicrophone, a filter, an oscillator, a pressure sensor, a radiofrequency identification (RFID) chip, or a speaker.

Example 4 may include the package assembly of example 2, furthercomprising one or more package-level interconnects coupled with theASIC.

Example 5 may include the package assembly of example 4, wherein anindividual package-level interconnect of the one or more package-levelinterconnects is coupled with the inactive side of the first MEMS; andwherein the individual package-level interconnect is coupled with theASIC through a through silicon via (TSV) from the inactive side of theMEMS to the active side of the MEMS, wherein the TSV is coupled with theASIC.

Example 6 may include the package assembly of example 2, wherein aninterconnect of the first one or more interconnects is coupled with aredistribution layer (RDL) of the ASIC.

Example 7 may include the package assembly of example 6, wherein thefirst one or more interconnects and the ASIC are coupled with anunderfill; wherein the underfill is configured to hermetically seal thefirst cavity; and wherein the first cavity is substantially free of theunderfill.

Example 8 may include the package assembly of example 7, wherein the RDLis coupled with each of the first one or more interconnects and theunderfill, the RDL configured to further hermetically seal the firstcavity.

Example 9 may include the package assembly of example 7, furthercomprising a mold compound encapsulating at least the inactive side ofthe first MEMS, the underfill, and at least a portion of the ASIC,wherein the cavity is substantially free of the mold compound.

Example 10 may include the package assembly of any of examples 2-6,further comprising a mold compound covering at least a portion of one ofthe active side or inactive side of the ASIC, wherein the first MEMS iscoupled with the other one of the active side or the inactive side ofthe ASIC.

Example 11 may include the package assembly of any of examples 2-6,wherein the ASIC comprises a third cavity disposed in the active side orthe inactive side of the ASIC; and wherein the first MEMS is coupledwith the ASIC within the third cavity.

Example 12 may include the package assembly of any of examples 2-4,wherein the first MEMS is coupled to one of the active side or theinactive side of the ASIC through the first one or more interconnects;and wherein the first MEMS is electrically coupled to the other one ofthe active side or the inactive side of the ASIC through one or morethrough silicon vias (TSVs) in the ASIC, wherein the one or more TSVsare configured to provide an electrical pathway from the one of theactive side or the inactive side of the ASIC to the other one of theactive side or the inactive side of the ASIC.

Example 13 may include the package assembly of example 12, wherein thefirst MEMS is electrically coupled to one or more of the TSVs via one ormore wirebonds.

Example 14 may include a method of manufacturing a package assembly, themethod comprising: coupling a microelectromechanical system (MEMS)having an active side and an inactive side to one or more interconnects;and coupling the one or more interconnects directly to anapplication-specific integrated circuit (ASIC) having an active side andan inactive side opposite the active side; wherein the MEMS, the ASIC,and the one or more interconnects define a cavity between the MEMS, theASIC, and the one or more interconnects.

Example 15 may include the method of example 14, wherein the MEMS is afirst MEMS, the cavity is a first cavity, and the one or moreinterconnects are first one or more interconnects, and furthercomprising: coupling a second MEMS to a second one or moreinterconnects; and coupling the second one or more interconnectsdirectly to the ASIC; wherein the ASIC, the second MEMS, and the secondone or more interconnects define a second cavity.

Example 16 may include the method of example 15, wherein coupling thefirst interconnect to the ASIC comprises coupling the first interconnectto a redistribution layer (RDL) of the ASIC.

Example 17 may include the method of examples 15 or 16, furthercomprising covering at least a portion of one of the active or inactiveside of the ASIC with a mold compound, wherein the first cavity issubstantially free of the mold compound.

Example 18 may include the method of examples 15 or 16, furthercomprising: forming a third cavity in the ASIC; and coupling the firstMEMS with the ASIC within the third cavity.

Example 19 may include the method of examples 15 or 16, furthercomprising coupling the first MEMS with the ASIC via a wirebond.

Example 20 may include the method of examples 15 or 16, furthercomprising coupling the ASIC with a circuit board through apackage-level interconnect.

Example 21 may include the method of example 20, further comprisingcoupling the package-level interconnect with the inactive side of thefirst MEMS; and coupling the package-level interconnect with the ASICthrough a through silicon via (TSV) from the inactive side of the MEMSto the active side of the MEMS, wherein the TSV is coupled with theASIC.

Example 22 may include the method of examples 15 or 16, furthercomprising: coupling the first MEMS to one of the active side or theinactive side of the ASIC through the first one or more interconnects;and electrically coupling the first MEMS to the other one of the activeside or the inactive side of the ASIC through one or more throughsilicon vias (TSVs) in the ASIC, wherein the one or more TSVs areconfigured to provide an electrical pathway from the one of the activeside or the inactive side of the ASIC to the other one of the activeside or the inactive side of the ASIC.

Example 23 may include a system with a reduced size package assembly,the system comprising: a circuit board; a package assembly coupled withthe circuit board, the package assembly comprising: anapplication-specific integrated circuit (ASIC) having an active side andan inactive side opposite the active side; a microelectromechanicalsystem (MEMS) having an active side and an inactive side; and one ormore interconnects; wherein the MEMS is coupled directly to the ASICthrough the one or more interconnects; and wherein the MEMS, the ASIC,and the one or more interconnects form a cavity between the MEMS, theASIC, and the one or more interconnects.

Example 24 may include the system of example 23, wherein the MEMS is afirst MEMS, the cavity is a first cavity, and the one or moreinterconnects are first one or more interconnects, the package assemblyfurther comprising: a second MEMS; and a second one or moreinterconnects; wherein the second MEMS is coupled directly to the ASICthrough the second one or more interconnects, wherein the second MEMS,the ASIC, and the second one or more interconnects form a second cavitybetween the second MEMS, the ASIC, and the second one or moreinterconnects.

Example 25 may include the package assembly of example 24, wherein thefirst MEMS is a gyroscope, an accelerometer, a magnetometer, amicrophone, a filter, an oscillator, a pressure sensor, a radiofrequency identification (RFID) chip, or a speaker.

Various embodiments may include any suitable combination of theabove-described embodiments including alternative (or) embodiments ofembodiments that are described in conjunctive form (and) above (e.g.,the “and” may be “and/or”). Furthermore, some embodiments may includeone or more articles of manufacture (e.g., non-transitorycomputer-readable media) having instructions, stored thereon, that whenexecuted result in actions of any of the above-described embodiments.Moreover, some embodiments may include apparatuses or systems having anysuitable means for carrying out the various operations of theabove-described embodiments.

The above description of illustrated implementations of the invention,including what is described in the Abstract, is not intended to beexhaustive or to limit the invention to the precise forms disclosed.While specific implementations of, and examples for, the invention aredescribed herein for illustrative purposes, various equivalentmodifications are possible within the scope of the invention, as thoseskilled in the relevant art will recognize.

These modifications may be made to the invention in light of the abovedetailed description. The terms used in the following claims should notbe construed to limit the invention to the specific implementationsdisclosed in the specification and the claims. Rather, the scope of theinvention is to be determined entirely by the following claims, whichare to be construed in accordance with established doctrines of claiminterpretation.

What is claimed is:
 1. A package assembly comprising: anapplication-specific integrated circuit (ASIC) with a first face and asecond face opposite the first face; and a microelectromechanical system(MEMS) with a first face and a second face opposite the first face;wherein the MEMS, the ASIC, and one or more interconnects form a cavitybetween the MEMS, the ASIC, and the one or more interconnects such thatthe first face of the MEMS is exposed within the cavity.
 2. The packageassembly of claim 1, further comprising one or more package-levelinterconnects coupled with the first face of the ASIC.
 3. The packageassembly of claim 2, further comprising one or more die-levelinterconnects electrically coupled with the second face of the ASIC andthe first face of the MEMS.
 4. The package assembly of claim 3, whereinthe one or more die-level interconnects are positioned external to thecavity.
 5. The package assembly of claim 3, wherein the one or moredie-level interconnects are positioned within the cavity.
 6. The packageassembly of claim 3, wherein one of the one or more package-levelinterconnects is communicatively coupled with one of the one or moredie-level interconnects by a through-silicon via (TSV).
 7. The packageassembly of claim 6, wherein the one die-level interconnect is directlyphysically coupled with the TSV.
 8. The package assembly of claim 1,wherein the MEMS has a smaller lateral area than a lateral area of theASIC.
 9. The package assembly of claim 1, wherein the MEMS is agyroscope, an accelerometer, a magnetometer, a microphone, a filter, anoscillator, a pressure sensor, a radio frequency identification (RFID)chip, or a speaker.
 10. The package assembly of claim 1, wherein thefirst face is an active side of the MEMS and the second face is aninactive side of the MEMS.
 11. The package assembly of claim 1, whereinthe MEMS is a first MEMS and further comprising a second MEMS coupledwith the ASIC.
 12. The package assembly of claim 1, wherein the one ormore interconnects comprise a non-conducting material.
 13. The packageassembly of claim 1, wherein the one or more interconnects comprise aconductive material.
 14. The package assembly of claim 1, wherein theone or more interconnects are one interconnect.
 15. The package assemblyof claim 1, wherein the one or more interconnects are two or moreinterconnects.
 16. The package assembly of claim 1, wherein the cavityis exposed to external atmosphere.
 17. A package assembly comprising: anapplication-specific integrated circuit (ASIC) with a first face and asecond face opposite the first face; a microelectromechanical system(MEMS) with an active side and an inactive side opposite the activeside, the active side of the MEMS coupled with the second face of theASIC by one or more interconnects and one or more die-levelinterconnects; and one or more package-level interconnects coupled withthe first face of the ASIC, the one or more package-level interconnectscommunicatively coupled with the one or more die-level interconnects byone or more through-silicon vias (TSVs); wherein the MEMS, the ASIC, andone or more interconnects form a cavity between the MEMS, the ASIC, andthe one or more interconnects such that the active side of the MEMS isexposed within the cavity and the one or more die-level interconnectsare positioned external to the cavity.
 18. The package assembly of claim17, wherein the MEMS is a first MEMS and further comprising a secondMEMS coupled with the ASIC.
 19. The package assembly of claim 17,wherein the one or more interconnects comprise a non-conductingmaterial.
 20. The package assembly of claim 17, wherein the one or moredie-level interconnects are directly physically coupled with one or moreTSVs.
 21. The package assembly of claim 17, wherein the MEMS has asmaller lateral area than a lateral area of the ASIC.
 22. The packageassembly of claim 17, wherein the MEMS is a gyroscope, an accelerometer,a magnetometer, a microphone, a filter, an oscillator, a pressuresensor, a radio frequency identification (RFID) chip, or a speaker. 23.The package assembly of claim 17, wherein the active side of the MEMS iscoupled directly with the second face of the ASIC by the one or moreinterconnects and the one or more die-level interconnects.
 24. A packageassembly comprising: an application-specific integrated circuit (ASIC);and a microelectromechanical system (MEMS) with an active face; whereinthe MEMS, the ASIC, and one or more interconnects form a cavity betweenthe MEMS, the ASIC, and the one or more interconnects such that theactive face of the MEMS is exposed within the cavity.
 25. The packageassembly of claim 24, further comprising one or more package-levelinterconnects coupled with the ASIC on a side of the ASIC opposite thecavity.
 26. The package assembly of claim 24, wherein the MEMS is afirst MEMS and further comprising a second MEMS coupled with the ASIC.27. The package assembly of claim 24, wherein the one or moreinterconnects comprise a non-conducting material.
 28. The packageassembly of claim 24, wherein the one or more interconnects comprise aconductive material.
 29. The package assembly of claim 24, wherein thecavity is exposed to external atmosphere.